Quantitative EDS analysis  - an example printout

The EDX option of an SEM can be used for quick and convenient quantitative analysis. Sometimes it is one of several analytical methodes, in other cases it is the only means to get results. In the example shown on this page a sample of granulated catalysator parts has been investigated. A fraction of highly magnetically susceptible particles of light ashes has been collected and analysed. This fraction shows a rather high content of Fe2O3.


Spectrum file : KATA14
catalysator, sample A, fraction highly magnetically susceptible, 5qmm      LIVETIME(spec.)=   200
 ENERGY    RES     AREA
-   2.1   69.44   140308
TOTAL AREA=   130865
...
FIT INDEX=  .59                       the program fits standard spectra to the sample spectrum,
                                      then calculates the quality of the fit and a first approximation
ELMT      APP.CONC   ERROR(WT%)       of the concentrations, that have to be refined afterwards
MgK : 0     .139      .040
AlK : 0    1.067      .043
SiK : 0    1.624      .057
S K : 0    3.515      .081
K K : 0    1.642      .052
CaK : 0     .424      .041
TiK : 0    7.238      .097
V K : 0     .098      .060* < 2 Sigma*      * vanadium is found to be below detection limit
FeK : 0    4.709      .124
W M : 0     .825      .143
AuM : 0    2.767      .163Not used for quantitation      lines listed left are not necessary for quantitation
AuL : 0    4.478      .483Not used for quantitation      because they for instance represent sputter material
CuK : 0     .311      .103Not used for quantitation
CuL : 0     .112      .183* < 2 Sigma*Not used for quantitation
W L : 0     .758      .253Not used for quantitation

ZAF CALCULATIONS                            the iterative procedure of the refinement starts

..[ 2 iterations]

20.00 kV  TILT=20.00 ELEV=20.00 AZIM=45.00 COSINE=1.000      the analytical conditions used are stated here

catalysator, sample A, fraction highly magnetically susceptible, 5qmm

Last elmt by STOICH.,NORMALISED             in this case oxygen has been calculated from stoichiometry

ELMT      ZAF    %ELMT +-     Error ATOM.%          %OXIDE    FORMULA   the final results:
MgK : 0  .579     .544 +-     .156    .554  MgO       .902      .100    the calculated error is for
AlK : 0  .693    3.488 +-     .141   3.198  Al2O3    6.590      .580    the stochastism of X-ray generation
SiK : 0  .775    4.746 +-     .167   4.180  SiO2    10.152      .757    and overlap of X-ray lines
S K : 0  .857    9.286 +-     .215   7.166  SO3     23.189     1.299
K K : 0 1.017    3.660 +-     .115   2.316  K2O      4.409      .420
CaK : 0  .997     .964 +-     .094    .595  CaO      1.349      .108
TiK : 0  .869   18.881 +-     .254   9.751  TiO2    31.494     1.767
V K : 0  .866   < .120 +-     .060                                      for vanadium the respective detection
FeK : 0  .858   12.440 +-     .326   5.510  Fe2O3   17.785      .999    limit has been calculated
W M : 0  .642    2.913 +-     .505    .392  WO3      3.673      .071
O K : 0  .000   42.824              66.214                    12.000
TOTAL           99.745             100.000          99.545     6.100


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